Scientific Publications, Communications and delivrables of the LastStep Project
Scientific Publications
Isothermal Heteroepitaxy of Ge1–xSnx Structures for Electronic and Photonic Applications
Omar Concepción, ,Nicolaj B. Søgaard, Jin-Hee Bae, Yuji Yamamoto, Andreas T. Tiedemann, Zoran Ikonic, Giovanni Capellini, Qing-Tai Zhao, Detlev Grützmacher, Dan Buca, ACS Appl. Electron. Mater., 5, 4, 2268–2275, 2023. DOI: 10.1021/acsaelm.3c00112
Innovative Annealing Technology for Thermally Stable Ni(GeSn) Alloys,
A. Quintero, P. A. Alba, J. -M. Hartmann, P. Gergaud, V. Reboud and P. Rodriguez, 21st International Workshop on Junction Technology (IWJT), Kyoto, Japan, pp. 1-4, 2024. DOI: 10.23919/IWJT59028.2023.10175097.
Advances in GeSn alloys for MIR applications,
V. Reboud, O. Concepción, W. Du, M. El Kurdi, J.M. Hartmann, Z. Ikonic, S. Assali, N. Pauc, V. Calvo, C. Cardoux, E. Kroemer, N. Coudurier, P. Rodriguez, S.-Q. Yu, D. Buca, A. Chelnokov, Photonics and Nanostructures - Fundamentals and Applications, 58, art. no. 101233, 2024. DOI: 10.1016/j.photonics.2024.101233
Modeling and design of GeSn avalanche photodiodes with high tin content for applications at 3.3 µm,
L. Finazzi, R. Giani, O. Concepcion, D. Buca, V. Reboud, G. Isella, A. Tosi, IEEE Journal of Selected Topics in Quantum Electronics, pp. 1-9, 2024. DOI: 10.1109/JSTQE.2024.3439495
Impact of flows, temperature and pressure on the GeSn growth kinetics with a digermane and tin tetrachloride chemistry,
J.M. Hartmann , T. Marion, Materials Science in Semiconductor Processing, 169, art. no. 107893, 2024. DOI: 10.1016/j.mssp.2023.107893
Use of Nanosecond Laser Annealing for Thermally Stable Ni(GeSn) Alloys,
A. Quintero, P.A. Alba, J.-M., Hartmann, D. Cooper, P. Gergaud, V. Reboud, P. Rodriguez, IEEE Journal of the Electron Devices Society, 11, pp. 687 - 694, 2023. DOI: 10.1109/JEDS.2023.3332094
Room Temperature Lattice Thermal Conductivity of GeSn Alloys,
O. Concepción, J. Tiscareño-Ramírez, A.A. Chimienti, T. Classen, A.A. Corley-Wiciak, A. Tomadin, D. Spirito, D. Pisignano, P. Graziosi, Z. Ikonic, Q.T. Zhao , D. Grützmacher , G. Capellini, S. Roddaro, M. Virgilio, D. Buca, ACS Applied Energy Materials, 7 (10), pp. 4394 - 4401, 2024. DOI: 10.1021/acsaem.4c00275
Enhancing the Detectivity of Direct Bandgap Ge0.86Sn0.14 Photodiodes by Layer Transfer,
C. Cardoux , E. Kroemer , L. Casiez , M. Frauenrath, N. Pauc , V. Calvo, S. Assali , J.M. Hartmann , N. Coudurier , P., Rodriguez, J. Chrétien, J. Widiez, O. Gravrand, A. Chelnokov, V. Reboud, IEEE International Conference on Group IV Photonics GFP, 2024. DOI: 10.1109/SiPhotonics60897.2024.10544244
Ex-situ n-type doped carrier-injection layers in direct bandgap GeSn LEDs,
L. Casiez, C. Cardoux, P. Acosta Alba, N. Bernier, J. Richy, N. Pauc, V. Calvo, N. Coudurier, P. Rodriguez, O. Concepción, D. Buca, M. Frauenrath, J.M. Hartmann , A. Chelnokov, V. Reboud, Materials Science in Semiconductor Processing, 182, art. no. 108654, 2024. DOI: 10.1016/j.mssp.2024.108654A.
Continuous-wave electrically pumped multi-quantum-well laser based on group-IV semiconductors
Lukas Seidel, Teren Liu, Omar Concepción, Bahareh Marzban, Vivien Kiyek, Davide Spirito, Daniel Schwarz, Aimen Benkhelifa, Jörg Schulze, Zoran Ikonic, Jean-Michel Hartmann, Alexei Chelnokov, Jeremy Witzens, Giovanni Capellini, Michael Oehme, Detlev Grützmacher & Dan Buca, Nat Commun 15, 10502 (2024).
Dynamics of thermal-induced Sn segregation in GeSn at the nanometer scale
Segura-Ruiz J., Bonino V., Rosenthal M., Pauc N., Calvo V., Frauenrath M., Cardoux C., Hartmann J.-M., Chelnokov A., Reboud V., , (2025) Journal of Alloys and Compounds, 1020, art. no. 179435, DOI: 10.1016/j.jallcom.2025.179435
Low-Resistance and Thermally Stable Ohmic Contacts on n-GeSn Using Ni and Ti Metallization
Coudurier N., Quintero A., Pellerin R., Robin M., Hartmann J.-M., Reboud V., Rodriguez P., (2025) IEEE Transactions on Electron Devices, 72 (4), pp. 2065 – 2072, DOI: 10.1109/TED.2025.3542347
Toward thermally stable Ni(GeSn) contacts using pre-amorphization by implantation or nanosecond laser annealing
A. Quintero, M. Coig, F. Mazen, P. Acosta-Alba, J.-M. Hartmann, P. Gergaud, V. Reboud, Ph. Rodriguez, MRS Adv. 10, 213 (2025). https://doi.org/10.1557/s43580-024-01026-5
Presentations and Prices
PGI-Forum
Presentations of three posters with acknowledgment to LastStep.
Press release : The Last Missing Piece of Silicon Photonics
International research team presents first electrically pumped continuous-wave semiconductor laser suitable for seamless silicon integration
Best Oral Presentation Award : Improving the Thermal Stability of Ni(GeSn) Alloys Using Pre-Amorphization by Implantation and Nanosecond Laser Annealing
A. Quintero, M. Coig, F. Mazen, P. Acosta Alba, J.-M. Hartmann, P. Gergaud, V. Reboud, Ph. Rodriguez, 24th International Conference on Ion Implantation Technology 2024 (IIT 2024), Sept. 20-26, 2024 (Toyama, Japan).
Communications
Combining GeSn photonic layers with SiN stressor for advanced infrared laser designs and performances
Moustafa El Kurdi, Andjelika Bjelajac, G. Patriarche, Nicolas Pauc, Vincent Calvo, Alexei Chelnokov, Vincent Reboud, Jean-Michel Hartmann, Dan Buca, ISTDM ICSI 2023
GeSn/SiGeSn micro-rings laser diodes on Si
Teren Liu, Lukas Seidel, Bahareh Marzban, Jeremy Witzens, Giovanni Capellini, Michael Oehme, Detlev Grützmacher and Dan Buca, ISTDM ICSI 2023.
Thermoelectric properties of GeSn alloys
D. Buca, ISTDM ICSI 2023.
Ex-situ n-type doped carrier-injection layers in direct bandgap GeSn LEDs
L. Casiez, C. Cardoux, M. Frauenrath, P. Acosta Alba, N. Bernier, N. Pauc, V. Calvo, N. Coudurier, P. Rodriguez, O. Concepción Díaz, D. Buca, J.M. Hartmann, A. Chelnokov,V. Reboud, ISTDM ICSI 2023.
Isothermal heteroepitaxy of Ge1-xSnx structures for electronic and photonic applications
Omar Concepción, Nicolaj B. Søgaard, Jin-Hee Bae, Andreas T. Tiedemann, Yuji Yamamoto, Zoran Ikonic, Giovanni Capellini, Qing T. Zhao, Dan Buca, and Detlev Grützmacher, ISTDM ICSI 2023.
Temperature dependence of Raman scattering in Ge and GeSn layers
Diana Ryzhak, Agnieszka Anna Corley-Wiciak, Marvin Hartwig Zoellner, Omar Concepción, Costanza Lucia Manganelli, Oliver Skibitzki1, Dan Buca2, Giovanni Capellini, and Davide Spirito, ISTDM ICSI 2023.
Polarized-resolved Raman scattering of epitaxially grown GeSn layers with various Sn content
Agnieszka Anna Corley-Wiciak, Shunda Chen, Omar Concepción, Marvin Hartwig Zoellner, Detlev Grützmacher, Dan Buca, Tianshu Li, Giovanni Capellini, Davide Spirito, ISTDM ICSI 2023.
Group-IV Ge1-xSnx alloys: growth challenge and isothermal heteroepitaxy for electronic, photonic, and energy harvesting applications
Omar Concepción, Nicolaj B. Søgaard, P. Kaul, Jin-Hee Bae, Yuji Yamamoto, Andreas T. Tiedemann, Zoran Ikonic, Giovanni Capellini, Qing T. Zhao, Dan Buca, and Detlev Grützmacher
Thermally Stable Ohmic Contacts on GeSn Layers
. Coudurier, A. Quintero, R. Pellerin, J.-M. Hartmann, V. Reboud, Ph. Rodriguez, 31st Materials for Advanced Metallization Conference (MAM-2024), March 18-21, 2024 (Milano, Italy).
Improving the Thermal Stability of Ni(GeSn) Alloys Using Pre-Amorphization by Implantation and Nanosecond Laser Annealing
A. Quintero, M. Coig, F. Mazen, P. Acosta Alba, J.-M. Hartmann, P. Gergaud, V. Reboud, Ph. Rodriguez, 24th International Conference on Ion Implantation Technology 2024 (IIT 2024), Sept. 20-26, 2024 (Toyama, Japan).
GeSnOI platform for future development of extended-NIR silicon photonics
M. El Kurdi, SPIE Photonics Europe, Integrated Photonics Platform III, session 6: integrated light amplification and emission, Strasbourg, France, 7-11 Avril 2024
Germanium-Tin quantum well mid-IR lasing up to room temperature
M. El Kurdi, International Material Reseach Congress IMRC, Symposium G5 Recent Trends in Functional Semiconducting Materials, Cancun, Mexico, August 18-23 (2024)
Laser infrarouge de la filière silicium à base d’alliages GeSn
M. El Kurdi, JNMO Journées Nano-Microélectronique, Sète, France, 1-4 Octobre 2024
Strained GeSn-on-insolator quantum well laser for the extended-NIR silicon photonics
Antoine Meyer, Maria-Alejandra Mendez, Antonin Macquart, Omar Concepción, Dan Buca, Moustafa El-Kurdi, SPIE Photonics Europe, Integrated Photonics Platform III, session 1: quantum photonics, Strasbourg, France, 7-11 Avril 2024
New design of electrically pumped GeSnOI laser integrated on a Si-photonics platform
Maria Alejandra MENDEZ RINCON, Omar Concepción, Dan Buca, Moustafa El-Kurdi, SPIE Photonics Europe, Integrated Photonics Platform III, session 6: integrated light amplification and emission, Strasbourg, France, 7-11 Avril 2024
Strained GeSn-on-insulator quantum well laser for the extended-NIR silicon photonics
Antoine Meyer, Maria-Alejandra Mendez, Antonin Macquart, Omar Concepción, Dan Buca, Moustafa El-Kurdi, SPIE Photonics West, San Francisco,Silicon Photonics XXI, California US, January 2025